ELECTROSTATIC FREE-FREE BEAM MICROELECTROMECHANICAL RESONATOR

Abstract

Several free-free beam micro-resonators are designed and fabricated using two commercially available surface micromachining processes, the UW-MEMS process and PolyMUMPs. Theoretical derivations of the design parameters are presented and an electrical lumped behavior model is developed for a single resonator with direct mechanic-to-electric analogy. A finite-element analysis (FEA) tool, the COMSOL Multiphysics 4.2a, is utilized to simulate the effects of the critical structural dimensions and electromechanical coupling. A variety of analyses, such as modal, static and dynamic responses are performed in FEA and the results are compared with the analytical solutions. The static and dynamic performances of the fabricated UW-MEMS resonators are tested using the Vecco NT-9100 In-Motion System. The electrical testing is carried out to obtain the frequency characteristics in electrical domain of the device. Measured data are compared with the analytical and simulation results. Discrepancies are discussed and analyzed.