Photogrammetry and Image Fusion Techniques for High-Quality Colour 3D Reconstruction of MEMS Structures

Abstract

Obtaining a three-dimensional image of a MEMS (Micro Electro Mechanical Systems) chip can be challenging due to its small size, necessitating work at a micrometer scale. In this work, photogrammetry will be used to capture three-dimensional images of MEMS. To construct these 3D images, multiple images are taken from a perspective view to include the height and three-dimensional details. When capturing images from a perspective view through a microscope, only a portion of the image will be in focus. To produce an all-in-focus 3D image, three imaging techniques will be employed. Image registration will be necessary to ensure alignment since vibration can cause pixels to shift in each frame. Subsequently, focus measurement techniques will be utilized to determine which parts of the image are in focus and which are not. This information will be used to generate a depth map indicating which image has the best focus. A final fused image in which all pixels are in focus will be formed from the depth map, showcasing all the intricate details of the MEMS chip. In this study, we will examine the effects of smoothing, focus measure operators, and the number of images required to make an adequate image.