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dc.contributor.authorAdderson, Ryan
dc.date.accessioned2019-04-29T18:01:34Z
dc.date.available2019-04-29T18:01:34Z
dc.identifier.urihttp://hdl.handle.net/10222/75659
dc.description.abstractThis thesis examines the development and testing of a new algorithm for measuring rectilinear displacements in Micro Electro Mechanical Systems (MEMS), however the algorithm could easily be applied to other applications. This optical measurement technique is based on cross correlation used in signal matching. The primary objective of this thesis is to develop a system with improved resolution and versatility which can be applied to a wide variety of MEMS chip designs. Experiments testing this new algorithm had a standard deviation in the measurement as low as 0.23 nm (equivalent to less than 1/700 of a pixel). This result is approximately 4.5 times better than previously found in the Dalhousie MEMS lab using existing algorithms. In addition, when the conditions of the measurement were made worse, the new algorithm consistently outperformed the existing algorithm. Further development may be able to yield additional improvements in the measurements.en_US
dc.language.isoenen_US
dc.subjectMEMSen_US
dc.subjectOptical Measurementsen_US
dc.titleDevelopment of a Technique for Sub-nm Measurements of 1-D Motion and its Application to MEMSen_US
dc.date.defence2019-04-16
dc.contributor.departmentDepartment of Mechanical Engineeringen_US
dc.contributor.degreeMaster of Applied Scienceen_US
dc.contributor.external-examinern/aen_US
dc.contributor.graduate-coordinatorDominic Groulxen_US
dc.contributor.thesis-readerDominic Groulxen_US
dc.contributor.thesis-readerYuan Maen_US
dc.contributor.thesis-supervisorTed Hubbarden_US
dc.contributor.ethics-approvalNot Applicableen_US
dc.contributor.manuscriptsNot Applicableen_US
dc.contributor.copyright-releaseNot Applicableen_US
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