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dc.contributor.authorFettig, Heiko Michael.en_US
dc.date.accessioned2014-10-21T12:35:18Z
dc.date.available2014-10-21T12:35:18Z
dc.date.issued2001en_US
dc.identifier.otherAAINQ63476en_US
dc.identifier.urihttp://hdl.handle.net/10222/55744
dc.descriptionThis thesis examines the design, simulation and testing of micromachined flexible joints. Micromachined devices or MEMS (Micro-Electro-Mechanical Systems) combine mechanical parts as well as electronic parts on a micro-scale. The objective of this research is to mimic the kinematics of classical macro rotating and sliding joints with flexural micro-joints.en_US
dc.descriptionThe joints consist of long slender beams that are folded in a variety of shapes: 'I', 'H', 'X', 'S', 'U' and 'V' shaped joints are considered. Finite element simulations are used to calculate in-plane rotational, axial and lateral stiffness, out-of-plane rotational stiffness and examine the effect of variations in joint length and beam angles.en_US
dc.descriptionThe simulation results are compared to a series of dynamic tests of polysilicon micromachined joints. The resonant frequencies of joint-mass systems are measured using a non-contacting laser reflectance system and the derived experimental in-plane rotational stiffnesses are found to agree with simulations.en_US
dc.descriptionDesign guidelines for the selection of the best suited joint shape and length for given functional requirements such as directional stiffness, selective compliance, and range of motion are presented. Two examples of joint use in planar micro-mechanisms are given.en_US
dc.descriptionThesis (Ph.D.)--Dalhousie University (Canada), 2001.en_US
dc.languageengen_US
dc.publisherDalhousie Universityen_US
dc.publisheren_US
dc.subjectEngineering, Mechanical.en_US
dc.titleDesign, simulation and testing of micromachined flexible joints.en_US
dc.typetexten_US
dc.contributor.degreePh.D.en_US
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