Browsing Faculty of Graduate Studies Online Theses by Subject "MEMS, Free-Free Beam, Resonator, Electrostatic, FEA, Dynamic"
Now showing items 1-1 of 1
-
ELECTROSTATIC FREE-FREE BEAM MICROELECTROMECHANICAL RESONATOR
(2012-11-15)Several free-free beam micro-resonators are designed and fabricated using two commercially available surface micromachining processes, the UW-MEMS process and PolyMUMPs. Theoretical derivations of the design parameters are ...