Browsing by Subject "Optical Measurements"
Now showing items 1-1 of 1
-
Development of a Technique for Sub-nm Measurements of 1-D Motion and its Application to MEMS
(2019-04-29)This thesis examines the development and testing of a new algorithm for measuring rectilinear displacements in Micro Electro Mechanical Systems (MEMS), however the algorithm could easily be applied to other applications. ...