Browsing Faculty of Graduate Studies Online Theses by Author "Zhang, Tianming"
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ELECTROSTATIC FREE-FREE BEAM MICROELECTROMECHANICAL RESONATOR
Zhang, Tianming (2012-11-15)Several free-free beam micro-resonators are designed and fabricated using two commercially available surface micromachining processes, the UW-MEMS process and PolyMUMPs. Theoretical derivations of the design parameters are ...