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dc.contributor.author Zhang, Tianming
dc.date.accessioned 2012-11-15T15:25:07Z
dc.date.available 2012-11-15T15:25:07Z
dc.date.issued 2012-11-15
dc.identifier.uri http://hdl.handle.net/10222/15700
dc.description.abstract Several free-free beam micro-resonators are designed and fabricated using two commercially available surface micromachining processes, the UW-MEMS process and PolyMUMPs. Theoretical derivations of the design parameters are presented and an electrical lumped behavior model is developed for a single resonator with direct mechanic-to-electric analogy. A finite-element analysis (FEA) tool, the COMSOL Multiphysics 4.2a, is utilized to simulate the effects of the critical structural dimensions and electromechanical coupling. A variety of analyses, such as modal, static and dynamic responses are performed in FEA and the results are compared with the analytical solutions. The static and dynamic performances of the fabricated UW-MEMS resonators are tested using the Vecco NT-9100 In-Motion System. The electrical testing is carried out to obtain the frequency characteristics in electrical domain of the device. Measured data are compared with the analytical and simulation results. Discrepancies are discussed and analyzed. en_US
dc.language.iso en en_US
dc.subject MEMS, Free-Free Beam, Resonator, Electrostatic, FEA, Dynamic en_US
dc.type Thesis en_US
dc.date.defence 2012-10-31
dc.contributor.department Department of Electrical & Computer Engineering en_US
dc.contributor.degree Master of Applied Science en_US
dc.contributor.external-examiner n/a en_US
dc.contributor.graduate-coordinator Dr. Jacek Ilow en_US
dc.contributor.thesis-reader Dr. Kamal El-Sankary, Dr. William Phillips en_US
dc.contributor.thesis-supervisor Dr. Yuan Ma, Dr. Zhizhang (David) Chen en_US
dc.contributor.ethics-approval Not Applicable en_US
dc.contributor.manuscripts Not Applicable en_US
dc.contributor.copyright-release Not Applicable en_US

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