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Enhanced Measurements in Fourier Analysis of MEMS Dynamics

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dc.contributor.author Mottaghi, Mehrdad
dc.date.accessioned 2012-06-28T18:26:59Z
dc.date.available 2012-06-28T18:26:59Z
dc.date.issued 2012-06-28
dc.identifier.uri http://hdl.handle.net/10222/15022
dc.description.abstract This thesis presents a method for dynamic characterization of MEMS structures and discuses parameters that affect its measurements and techniques to improve them. Current methods of non-contact, laser based vibration measurement require special and expensive instruments. The method used in this thesis on the other hand, relies on Fast Fourier Transform analysis of blurred images captured using conventional cameras. The Fourier series analysis and transformation are introduced. Basic concepts of blur image analysis and associated technical terms are described. Step by step data extraction process for Fourier analysis of blurred images and results such as amplitude, attenuation, signal to noise ratio and Bessel curve are explained. Macro and micro scale experiments are designed and used to determine the effect and significance of different parameters on signal-to-noise ratio of extracted results. For this purpose geometrical parameters of macro scale combs such as length, width and duty cycle are varied across a considerable range and tests results are examined. In addition to the experiments, MATLAB code is used to model environmental effects such as addition of noise or changes of brightness. In micro scale experiments, extra patterns are created using Focused Ion Beam and etching process. Test and comparison of modified micro structures with unpatterned structures show improvement in signal to noise ratio especially in environments with high level of noise. en_US
dc.language.iso en en_US
dc.subject Blurred Image, Dynamic Measurements, Fast Fourier Transform, Focused Ion Beam, MEMS en_US
dc.title Enhanced Measurements in Fourier Analysis of MEMS Dynamics en_US
dc.date.defence 2012-06-14
dc.contributor.department Department of Mechanical Engineering en_US
dc.contributor.degree Master of Applied Science en_US
dc.contributor.external-examiner Yuan Ma en_US
dc.contributor.graduate-coordinator Prabir Basu en_US
dc.contributor.thesis-reader Dominic Groulx en_US
dc.contributor.thesis-supervisor Ted Hubbard, Marek Kujath en_US
dc.contributor.ethics-approval Not Applicable en_US
dc.contributor.manuscripts Not Applicable en_US
dc.contributor.copyright-release Not Applicable en_US

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