Browsing by Author "18e1beb5-7c53-470a-8fe0-6bbb0d27f45a"
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Development of a Technique for Sub-nm Measurements of 1-D Motion and its Application to MEMS
Adderson, Ryan (2019-04-29)This thesis examines the development and testing of a new algorithm for measuring rectilinear displacements in Micro Electro Mechanical Systems (MEMS), however the algorithm could easily be applied to other applications. ...